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| The SAES Getters InsiTorr Pumps are special NEG pumps based on high porosity sintered material for maximum pumping and long lifetime through successive activation and air venting steps.
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SAES Getters has specifically designed the InsiTorr pumps for installation inside the transfer and process chambers to provide in-situ pumping and achieve better vacuum conditions. Because of the use directly inside the vacuum chamber, there is no foot-print implication.
The InsiTorr pumps are effective to achieve faster pump down and cleaner process environment due to their positioning close to the process area and to their inertness to the process gas where argon is used. |
Developed for the sputtering systems of semiconductor, data storage and flat display manufacturing, the InsiTorr pumps can be used in other manufacturing processes run in vacuum or in inert gas.
Custom made models are also available to fit specific geometrical configuration.
Highlights
- Compatibility with semiconductor process systems
- Compactness
- Retrofittability
- Ease of use
Applications
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