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	WaferGetter Pumps   The WaferGetter is a special type of vacuum pump based on Non-Evaporable getter materials. It consists of a bare silicon wafer with a layer of getter material, the SAES Getters St122 alloy, deposited and sintered on one side.             SAES Getters has developed this pump as a dedicated solution to provide an additional pumping device inside a process chamber of a thin film deposition system. In fact, in combination with the existing pumping system, the WaferGetter allows to achieve lower base pressure in a much shorter time. The WaferGetter pumps are available in wafer sizes of 200 mm and 150 mm. Therefore they can be introduced into a process chamber capable of handling 150mm or 200mm wafers as a normal silicon wafer by means of standard wafer handling systems. Once placed inside the process chamber, it can be activated simply heating the silicon substrate with the heating system usually present in the chamber (heater pedestal, I.R. quartz lamp, etc.).   Highlights Compatibility with semiconductor process systems Compactness Retrofittability Ease of use Applications Thin Film Deposition         Product Literature  WaferGetter Brochure  Download Acrobat   click here to download the Adobe Acrobat Reader!