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  IntegraTorr - NEG Coating

 

      

IntegraTorr represents a revolutionary way to integrate non-evaporable getter pumping into a particle accelerator vacuum chamber. It is achieved by depositing a sputtered NEG (Non-Evaporable Getter) coating onto the surface of the vacuum chamber. The result is that the surface of the vacuum chamber, normally an outgassing source, becomes a vacuum pump. Besides providing a true, fully distributed pumping system, the IntegraTorr NEG coating also reduces the degassing induced by ion, electron and photon bombardment.

The technique of sputtering thin-film NEG coatings for use as vacuum pumping for Particle Accelerators was developed and patented at CERN in order to meet needs that emerged in the Large Hadron Collider (LHC) project. Thanks to a license agreement, this technology is now commercially available under the brand name of IntegraTorr through the SAES Getters Group. 

Highlights

  • True high speed distributed pumping
  • High total pumping speed
  • Simpler vacuum chamber geometry (no need for pumping antechambers; reduction of external ports)
  • Activation achieved with a low-temperature baking process (180 °C)
  • Drastic decrease of thermal and photon-induced outgassing
  • Reduction of conditioning time and bremsstrahlung
  • Lower Secondary-Electron Yield
  • Multiple air exposures and reactivation possibility

Applications

 


  Product Literature

 IntegraTorr - NEG Coating Brochure (331 KB)

 The Transmission Factor Method (647 KB)

 NEG Coating of UHV Chambers for Particle Accelerators (1.37 MB)



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