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	Focus on NEG Pumps        NEGs Unique Features                                                           Highest pumping speed for H2 and H2O No moving parts Flexible configuration Low power consumption No low pressure limitation No interference by magnetic fields Light weight Low maintenance No vibration High pumping speed to bulk volume ration   NEGs Principles of Operation Sorption by chemical reaction of active gas molecules impinging on the clean surface of the getter material Need of activation; heat treatment under dynamic vacuum Three steps adsorption mechanism: surface dissociation, surface sorption and buk diffusion NEGs Specifications NEG pumps used alone or in combination with ion pumps, cryo pumps or turbomolecular pumps Operating pressure range: 10-3 to 10-13 mbar Pumping speed related to the active surface of the getter material and to the “traping” geometry of the pump’s structure